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https://doi.org/10.1109/TIE.2017.2748041 +
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https://doi.org/10.1109/TIE.2017.2748041 +
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9
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3576-3584
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https://doi.org/10.1109/TIE.2017.2748041 +
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IEEE Trans. Ind. Electron.
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IEEE Trans. Ind. Electron.
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65
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4
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Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications.
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2018
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Guoqiang Wu et al.: Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications. (2018)
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