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https://dblp.org/pid/03/7346 +
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, https://dblp.org/pid/29/5782 +
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http://purl.org/net/nknouf/ns/bibtex#Inproceedings +
|
| https://dblp.org/rdf/schema#createdBy
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https://dblp.org/pid/03/7346 +
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, https://dblp.org/pid/207/7149 +
, https://dblp.org/pid/29/5782 +
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| https://dblp.org/rdf/schema#documentPage
|
https://doi.org/10.1109/NEMS57332.2023.10190879 +
|
| https://dblp.org/rdf/schema#doi
|
https://doi.org/10.1109/NEMS57332.2023.10190879 +
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| https://dblp.org/rdf/schema#listedOnTocPage
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https://dblp.org/db/conf/nems/nems2023 +
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6
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| https://dblp.org/rdf/schema#pagination
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213-216
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| https://dblp.org/rdf/schema#primaryDocumentPage
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https://doi.org/10.1109/NEMS57332.2023.10190879 +
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| https://dblp.org/rdf/schema#publishedAsPartOf
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https://dblp.org/rec/conf/nems/2023 +
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NEMS
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| https://dblp.org/rdf/schema#publishedInBook
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NEMS
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https://dblp.org/streams/conf/nems +
|
| https://dblp.org/rdf/schema#title
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Microfabricated Aluminum Nitride MEMS Resonator.
|
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2023
|
| https://dblp.org/rdf/schema#yearOfPublication
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2023
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https://doi.org/10.1109/NEMS57332.2023.10190879 +
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https://dblp.org/rdf/schema#Publication +
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Yuxin Zhang et al.: Microfabricated Aluminum Nitride MEMS Resonator. (2023)
|
